CORRECTION METHOD FOR LASER IRRADIATION POSITION AND LASER PROCESSING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a correction method for a laser irradiation position capable of finally performing accurate correction of a laser irradiation position by quantitatively understanding a tendency of accuracy deterioration at simple measuring concerning to accuracy deterioration of the laser irradiation position when a shipped laser processing system starts up again after it is arrived.

SOLUTION: In the correction method for a laser irradiation position used in the laser processing system for processing by dividing into a plurality of processing areas, the method includes a step of preparing a plurality of test processing points on diagonal lines per respective processing areas at equal intervals and processing the test processing points by performing correction on the basis of predetermined first correction data; a step of measuring actual processing locations of the test processing points; a step of calculating an amount of gaps on planes of positions to be processed and actually processed positions on two axes crossed at a right angle; a step of calculating shift components and inclined components of the amount of gaps each two axes per each processing area; and a step of setting second correction data by taking correction information per each processing area calculated so as to cancel the shift components and the inclined components into the first correction data.

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