发明名称 OPTICAL SCANNING DEVICE AND SCANNING MICROSCOPE DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To raise the velocity of scanning without reducing the utilization efficiency of light. <P>SOLUTION: An optical scanning device 10 has a deflection element 1 that can deflect an incident beam by switching over the incident beam in a plurality of directions at prescribed switch-over timing, and a plurality of angle setting mirrors 13 arranged at different angles on optical paths LA to LD of the beams which has been deflected by the deflection element 1. The optical scanning device further has: a mirror array 3 that concentrates the beams, to each of which a relative angle on the same plane is assigned by the angle setting mirrors 13 on each of the optical paths LA to LD, into the same position; and a first scanner 5 that is disposed so as to be oscillable in synchronism with the switch-over timing around an axis perpendicular to the plane, and reflects the beams brought to incidence on the same position from different directions by the mirror array 3 to accomplish scanning along the same locus. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013113992(A) 申请公布日期 2013.06.10
申请号 JP20110259278 申请日期 2011.11.28
申请人 OLYMPUS CORP 发明人 TAKAHASHI SHINTARO
分类号 G02B26/10 主分类号 G02B26/10
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