| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a single-column inductive coupling plasma source that operates in an ion mode for FIB operation or electron mode for SEM operation, and configured to allow a user to make a selection. <P>SOLUTION: Energy dispersion type X-ray spectral analysis can be performed when an X-ray detector is mounted. The user selectively configures ICP so as to prepare a sample in the ion mode or FIB mode and actually moves a switch for selecting the electron mode or SEM mode, and can analyze the sample by using analysis of EDS or other types. <P>COPYRIGHT: (C)2013,JPO&INPIT |
