| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection apparatus and an inspection method which shorten the inspection time and inhibit errors regarding various inspection temperatures. <P>SOLUTION: An inspection apparatus 1a includes: a sample table 10 on which an inspected body 2 and a heat conductor 11a are placed; a probe (an inspection part) 14 which is provided facing the sample table 10 and contacts the inspected body 2 to conduct an inspection; a substrate 12 having a unit 15 supporting the probe 14 and a unit holder 13; and the heat conductor 11a that may contact the unit holder 13 and the sample table 10. An inspection method includes the steps of: installing the heat conductor 11a on the sample table 10; placing the heat conductor 11a in contact with the substrate 12; moving the heat conductor 11a from the sample table 10 and setting the inspected body 2 on the sample table 10; and placing the probe 14 in contact with the inspected body 2 to conduct the inspection. <P>COPYRIGHT: (C)2013,JPO&INPIT |
