发明名称 PHOTOSENSITIVE ADHESIVE FILM AND METHOD FOR PRODUCING SEMICONDUCTOR USING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive adhesive film having superior resolution, good adhesiveness, and storage stability. <P>SOLUTION: In the photosensitive adhesive film, an adhesive layer including: (A) 0.5-10 pts.mass of at least one cationic photopolymerization initiator selected from the group consisting of compounds represented by following chemical formula and the like; (B) 10-30 pts.mass of an epoxy resin; (C) 5-25 pts.mass of a curing agent for the epoxy resin; (D) 0.1-8 pts.mass of a photo-radical photopolymerization initiator; and (E) 30-75 pts.mass of a (meth)acrylic resin having a carboxyl group is formed on a separation base material. In the formula: Ph-S-Ph-S+(X<SP POS="POST">1</SP>)(X<SP POS="POST">2</SP>)Y-; X<SP POS="POST">1</SP>and X<SP POS="POST">2</SP>are each a hydrogen atom, a 1-12C linear or branched alkyl group, a phenyl group, or a benzyl group; Y is a hexafluoroarsonium group, hexafluorophosphonium group, hexafluoroantimonate group, trifluoromethane sulfonium group, or tetrafluoroboronium group. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013112720(A) 申请公布日期 2013.06.10
申请号 JP20110258726 申请日期 2011.11.28
申请人 SAMSUNG YOKOHAMA RESEARCH INSTITUTE CO LTD 发明人 KATO SHINYA;SUWA TATSUHIRO;SAKAI NOBUSHI
分类号 C09J7/02;C08F2/46;C08G59/18;C08J5/18;C09J11/06;C09J133/00;C09J163/00;G03F7/004;G03F7/027;G03F7/028;G03F7/032;G03F7/033;H01L21/027 主分类号 C09J7/02
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