| 摘要 |
PURPOSE: A wafer buffer device and a wafer processing system including the same are provided to improve productivity by shortening a moving path of a wafer. CONSTITUTION: A chamber(110) is arranged between a first EFEM and a second EFEM and connects the first EFEM to the second EFEM. A slot unit(120) is arranged in the chamber, supports wafers transferred from the first EFEM and stores the wafers before the wafers are transferred to the second EFEM. A moving unit(130) is formed in the bottom of the chamber and horizontally and rotatably moves the slot unit to easily transfer the wafers according to a first robot arm and a second robot arm. |
