| 摘要 |
PURPOSE: A method for regenerating an electrostatic chuck using aerosol is provided to regenerate a surface region by forming an aerosol ceramic coating film after the depth of a pattern groove is adjusted. CONSTITUTION: An electrostatic chuck is prepared(S1). The damaged surface of a dielectric layer is processed to be flat(S2). The depth of a pattern groove is adjusted to form a deep depth(S3). An aerosol ceramic coating film is formed in the upper part of the dielectric layer(S4). The surface flatness and the illumination of the aerosol ceramic coating film are controlled(S5). [Reference numerals] (AA) Start; (BB) End; (S1) Prepare an electrostatic chuck; (S2) Level a dielectric layer; (S3) Adjust the depth of a pattern groove; (S4) Coat with aerosol ceramic; (S5) Control flatness and illumination |
