| 摘要 |
<P>PROBLEM TO BE SOLVED: To easily measure constituent fluctuation of a metal oxide film in a sample evaluation device and a sample evaluation method. <P>SOLUTION: The sample evaluation method has the steps of: acquiring from a scanning nonlinear dielectric microscope 10 an output signal S<SB POS="POST">0</SB>showing nonlinear dielectric constant of an evaluation area F by scanning the evaluation area F of a metal oxide film 35 by a probe 14a of the scanning nonlinear dielectric microscope 10; and obtaining misalignment X corresponding to the acquired output signal S<SB POS="POST">0</SB>by referring to a table TB showing a relation between the misalignment X of a specific constituent element of the metal oxide film 35 and the output signal S<SB POS="POST">0</SB>. <P>COPYRIGHT: (C)2013,JPO&INPIT |
