The present disclosure provides a CMP pad conditioning tool with at least one integral abrasive protrusion. The present disclosure further provides a method for preparing this CMP pad conditioning tool, along with a method for using said tool to condition a CMP pad.
申请公布号
AU2011349393(A1)
申请公布日期
2013.06.06
申请号
AU20110349393
申请日期
2011.12.20
申请人
DIAMOND INNOVATIONS, INC.
发明人
RULAND, GARY E.;RAREY, CHARLES;EASLEY, THOMAS CHARLES;GRAHAM, JAMES;SCHWEIZER, MARK
