SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND COMPUTER READABLE STORAGE MEDIUM STORING SUBSTRATE PROCESSING PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing apparatus which accurately determines the appropriateness of the holding state of a substrate without being influenced by the material and surface state of the substrate.

SOLUTION: The invention has: substrate holding means (22) for holding a substrate (2); image capturing means (25) for capturing an image in a region where an end edge part of the substrate (2) exists when the substrate (2) is held by the substrate holding means (22) in a normal way; and control means (26) for determining the holding state of the substrate (2) held by the substrate holding means (22) on the basis of the image captured by the image capturing means (25).

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