| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance spatial resolution of a CT image in an industrial x-ray CT apparatus, and to provide x-ray detectors contributing to the enhancement of spatial resolution. <P>SOLUTION: The x-ray CT apparatus includes: an x-ray source for irradiating x-rays to an analyte; a linear array sensor configured by arranging a plurality of x-ray detectors 2 for detecting x-rays transmitted through the analyte like an array; a turntable arranged between the x-ray source and the x-ray detectors 2 to horizontally rotate the analyte; a signal processing circuit for numerizing x-ray transmission amounts measured by the x-ray detectors 2; and an arithmetic unit for reconstituting signals to an original image. Each x-ray detector 2 includes a semiconductor member 12 for detecting x-rays, a base plate 18 in which the semiconductor member 12 is buried and a shield plate 14 attached only to a one-side face of arrayed arrangement direction side out of faces of the semiconductor member 12 to shield leaked electrons. <P>COPYRIGHT: (C)2013,JPO&INPIT |
