| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mass distribution analysis method which can reduce an influence to a mass analysis result due to time variety of irradiation of an ionized beam to a sample and measure a mass distribution having high reliability. <P>SOLUTION: There is provided a mass distribution analysis method which irradiates a sample with a primary ion beam and detects generated secondary ions, in which the primary ion beam has a spread in a direction perpendicular to an advancing direction, and an orbit of the primary ion beam is deflected so as to adjust a path length from a primary ion source of each of primary ions included in the primary ion beam to a sample surface, and then the primary ion beam is injected inclining to the sample surface. <P>COPYRIGHT: (C)2013,JPO&INPIT |
