MICRO STRUCTURE, MICRO ACTUATORS, METHOD OF FABRICATING MICRO STRUCTURE AND MICRO ACTUATORS

摘要

A method for fabricating a micro-structure is provided, which can simply and easily fabricate the micro-structure by a batch process of directly forming a highly aligned nano-material array on a micro-structure to be used as an adhesive material during plastic deformation of the micro-structure without the use of existing complicated fabrication process.