发明名称 |
METHODS AND DEVICES FOR FABRICATING TRI-LAYER BEAMS |
摘要 |
Methods and devices for fabricating tri-layer beams are provided. In particular, disclosed are methods and structures that can be used for fabricating multilayer structures through the deposition and patterning of at least an insulation layer, a first metal layer, a beam oxide layer, a second metal layer, and an insulation balance layer.
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申请公布号 |
US2013143347(A1) |
申请公布日期 |
2013.06.06 |
申请号 |
US201213681045 |
申请日期 |
2012.11.19 |
申请人 |
WISPRY, INC.;WISPRY, INC. |
发明人 |
MORRIS, III ARTHUR SHERMAN;DEREUS DANA RICHARD;CUNNINGHAM SHAWN JAY |
分类号 |
B81C1/00 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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