| 发明名称 |
TUNABLE HUMIDITY SENSOR WITH INTEGRATED HEATER |
| 摘要 |
A capacitive humidity sensor includes a first electrode, a humidity sensitive dielectric layer, and a second electrode. The humidity sensitive dielectric layer is between the first and the second electrodes. The humidity sensitive dielectric layer is etched at selected regions to form hollow regions between the first and second electrodes.
|
| 申请公布号 |
US2013139587(A1) |
申请公布日期 |
2013.06.06 |
| 申请号 |
US201113310477 |
申请日期 |
2011.12.02 |
| 申请人 |
LE NEEL OLIVIER;CHERIAN SUMAN;SHANKAR RAVI;POH BOON NAM;MARSANNE SEBASTIEN;VAIANA MICHELE;STMICROELECTRONICS PTE LTD.;STMICROELECTRONICS S.R.I.;STMICROELECTRONICS ASIA PACIFIC PTE LTD. |
发明人 |
LE NEEL OLIVIER;CHERIAN SUMAN;SHANKAR RAVI;POH BOON NAM;MARSANNE SEBASTIEN;VAIANA MICHELE |
| 分类号 |
G01N27/22;B05D3/10;B05D5/12;C23F1/02 |
主分类号 |
G01N27/22 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
