发明名称 |
HOMOADAMANTANE DERIVATIVES, PROCESS FOR PREPARING SAME, AND PHOTORESIST COMPOSITIONS |
摘要 |
A compound represented by the following formula (I), wherein R1 is a hydrogen atom, a halogen atom, a methyl group or a trifluoromethyl group.
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申请公布号 |
US2013143157(A1) |
申请公布日期 |
2013.06.06 |
申请号 |
US201113816071 |
申请日期 |
2011.07.26 |
申请人 |
TANAKA SHINJI;UENOYAMA YOSHITAKA;ONO HIDETOSHI;KAWANO NAOYA;ITO KATSUKI;IDEMITSU KOSAN CO., LTD. |
发明人 |
TANAKA SHINJI;UENOYAMA YOSHITAKA;ONO HIDETOSHI;KAWANO NAOYA;ITO KATSUKI |
分类号 |
G03F7/004;C07D313/06 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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