| 摘要 |
<p>The present invention provides a lattice mismatched crystal template integrated by using a material monolithic with low glutinousness and a fabrication method therefor. The fabrication method for the crystal template comprises: providing a first crystal layer having a first lattice constant; growing a buffer layer on the first crystal layer; at a temperature lower than the fusing point of the buffer layer, sequentially carrying out a second crystal layer growing process and a first template layer growing process on the buffer layer to grow a second crystal layer and a template layer, or directly carrying out a first template layer growing process on the buffer layer to grow a template layer; and melting the buffer layer and converting the buffer layer into an amorphous buffer layer, at a growing temperature higher than a glass-transition temperature of the buffer layer, carrying out a second template layer growing process on the template layer grown in the first template layer growing process, and continuously growing the template layer till lattices of the template layer completely relax. Compared with the prior art, the present invention has the advantages of simple fabrication, realization of a combination of multiple lattice constant materials on the same substrate, low dislocation density, high crystal quality and the like.</p> |
