| 发明名称 |
LIQUID CHEMICAL DEPOSITION APPARATUS AND PROCESS AND PRODUCTS THEREFROM |
| 摘要 |
A method, apparatus and material produced thereby in an amorphous or crystalline form having multiple elements with a uniform molecular distribution of elements at the molecular level. |
| 申请公布号 |
EP2599113(A2) |
申请公布日期 |
2013.06.05 |
| 申请号 |
EP20110815040 |
申请日期 |
2011.07.25 |
| 申请人 |
DE ROCHEMONT, L. PIERRE |
发明人 |
KOVACS, ALEXANDER, J. |
| 分类号 |
H01L21/365;B05C5/00;B05C9/14;B05D3/02;B05D3/06;C01B19/00;C23C16/54;C23C18/12;C23C18/14 |
主分类号 |
H01L21/365 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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