发明名称 INTEGRATING N-TYPE AND P-TYPE METAL GATE TRANSISTORS
摘要 <p>At least a p-type and n-type semiconductor device deposited upon a semiconductor wafer containing metal or metal alloy gates. More particularly, a complementary metal-oxide-semiconductor (CMOS) device is formed on a semiconductor wafer having n-type and p-type metal gates.</p>
申请公布号 EP1573803(B1) 申请公布日期 2013.06.05
申请号 EP20030814832 申请日期 2003.12.15
申请人 INTEL CORPORATION 发明人 DOCZY, MARK;KEATING, STEVEN;KAVALIEROS, JACK;DOYLE, BRIAN;BARNS, CHRIS;BARNAK, JOHN;MCSWINEY, MICHAEL;BRASK, JUSTIN
分类号 H01L21/8238;H01L21/3213;H01L21/336;H01L29/49;H01L29/78 主分类号 H01L21/8238
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