发明名称
摘要 The subject of the invention is a coating method based on laser ablation where the distance between the substrate and the target being ablated is exceptionally small. The short distance allows coating the substrate even in industrial scale preferably also under a low-vacuum or even non-vacuum atmosphere. The invention is preferable in conjunction with the optimal coating of all large-size objects or objects with varying shapes.
申请公布号 JP5203226(B2) 申请公布日期 2013.06.05
申请号 JP20080555816 申请日期 2007.02.23
申请人 发明人
分类号 C23C14/28;B05D3/06;H05H1/24 主分类号 C23C14/28
代理机构 代理人
主权项
地址