发明名称 |
Reliability evaluation test apparatus, reliability evaluation test system, contactor, and reliability evaluation test method |
摘要 |
A reliability evaluation test apparatus of this invention includes a wafer storage section which stores a wafer in a state wherein the electrode pads of a number of devices formed on the wafer and the bumps of a contactor are totally in electrical contact with each other. The wafer storage section transmits/receives a test signal to/from a measurement section and has a hermetic and heat insulating structure. The wafer storage section has a pressure mechanism which presses the contactor and a heating mechanism which directly heats the wafer totally in contact with the contactor to a predetermined high temperature. The reliability of an interconnection film and insulating film formed on the semiconductor wafer are evaluated under an accelerated condition.
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申请公布号 |
US8456186(B2) |
申请公布日期 |
2013.06.04 |
申请号 |
US20070769432 |
申请日期 |
2007.06.27 |
申请人 |
TAKEKOSHI KIYOSHI;HOSAKA HISATOMI;HAGIHARA JUNICHI;HATSUSHIKA KUNIHIKO;USUI TAKAMASA;KANEKO HISASHI;HAYASAKA NOBUO;IDO YOSHIYUKI;TOKYO ELECTRON LIMITED;IBIDEN CO., LTD. |
发明人 |
TAKEKOSHI KIYOSHI;HOSAKA HISATOMI;HAGIHARA JUNICHI;HATSUSHIKA KUNIHIKO;USUI TAKAMASA;KANEKO HISASHI;HAYASAKA NOBUO;IDO YOSHIYUKI |
分类号 |
G01R31/02;G01R31/26;G01R1/04;G01R31/00;G01R31/28;G01R31/30;H01L21/66 |
主分类号 |
G01R31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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