发明名称 Method and system for indirect determination of local irradiance in an optical system
摘要 The invention concerns a method for the indirect determination of local irradiance in an optical system; wherein the optical system comprises optical elements between which an illuminated beam path is formed and a measurement object which absorbs the radiation in the beam path at least partially is positioned in a partial region of the beam path selected for the locally-resolved determination of the irradiance and the temperature distribution of at least one part of the measurement object is determined by means of a temperature detector.
申请公布号 US8454230(B2) 申请公布日期 2013.06.04
申请号 US20100706422 申请日期 2010.02.16
申请人 MELZER FRANK;SCHOLZ AXEL;CARL ZEISS SMT GMBH 发明人 MELZER FRANK;SCHOLZ AXEL
分类号 G01K7/00;G01J5/00 主分类号 G01K7/00
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