发明名称 |
Method and system for indirect determination of local irradiance in an optical system |
摘要 |
The invention concerns a method for the indirect determination of local irradiance in an optical system; wherein the optical system comprises optical elements between which an illuminated beam path is formed and a measurement object which absorbs the radiation in the beam path at least partially is positioned in a partial region of the beam path selected for the locally-resolved determination of the irradiance and the temperature distribution of at least one part of the measurement object is determined by means of a temperature detector.
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申请公布号 |
US8454230(B2) |
申请公布日期 |
2013.06.04 |
申请号 |
US20100706422 |
申请日期 |
2010.02.16 |
申请人 |
MELZER FRANK;SCHOLZ AXEL;CARL ZEISS SMT GMBH |
发明人 |
MELZER FRANK;SCHOLZ AXEL |
分类号 |
G01K7/00;G01J5/00 |
主分类号 |
G01K7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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