STRUCTURE FOR PREVENTING FROM ARCING BETWEEN SUSCEPTOR AND SHADOW FRAME

摘要

PURPOSE: An apparatus for preventing the generation of arcing between a susceptor and a shadow frame is provided to prevent the damage of a wafer by forming a profile roughness part by performing a blasting process on an accommodating part and a holding part. CONSTITUTION: A susceptor(10) comprises an accommodating part(15) and a holding part(12). The accommodating part receives an object. The holding part supports a shadow frame. A blasting process is performed on the accommodating part and the holding part in order to form a profile roughness part. The profile roughness part has different roughness.