发明名称 |
Method of producing gas barrier layer, gas barrier film for solar batteries and gas barrier film for displays |
摘要 |
A method according to the invention comprises: starting plasma discharge for forming the gas barrier layer in a film deposition chamber; and producing the gas barrier layer by using a plasma after a first predetermined period of time has elapsed from a start of the plasma discharge.
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申请公布号 |
US8455059(B2) |
申请公布日期 |
2013.06.04 |
申请号 |
US20100725577 |
申请日期 |
2010.03.17 |
申请人 |
TAKAHASHI TOSHIYA;TONOHARA KOUJI;TAKAHASHI SHINSUKE;FUJIFILM CORPORATION |
发明人 |
TAKAHASHI TOSHIYA;TONOHARA KOUJI;TAKAHASHI SHINSUKE |
分类号 |
H05H1/24 |
主分类号 |
H05H1/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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