| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an alignment method, by which alignment between a resin stamper and a substrate can be precisely performed even when a deformation of the resin stamper is caused. <P>SOLUTION: An alignment method for performing alignment between a resin stamper 16 and a substrate 18 in transferring a fine recessed and projecting pattern of the resin stamper 16, on one surface of which the fine recessed and projecting pattern is formed, to a photo-curing resin layer 20 formed on the substrate 18 includes the following steps: a fixing step of mounting the resin stamper 16 so that the surface on the opposite side from the recessed and projecting pattern forming surface 16a thereof is brought into contact with a stage 12 arranged so as to face the substrate 18 and fixing the resin stamper 16 from the side of the surface on the opposite side; a detection step of detecting a deformed portion of the resin stamper 16; and an elongation and contraction step of elongating and contracting the resin stamper 16 in a plane direction thereof in the fixed state, on the basis of the detected result of the deformed portion. <P>COPYRIGHT: (C)2013,JPO&INPIT |
