| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a photoelectric conversion element, capable of manufacturing at low cost a large area photoelectric conversion element using a nitride semiconductor, and to provide a photoelectric conversion element and a photoelectric conversion element module. <P>SOLUTION: The manufacturing method of a photoelectric conversion element, comprising processes of: forming a first buffer layer 2, a second buffer layer 600, an i-type nitride semiconductor layer 500, and an n-type nitride semiconductor layer 400 on a first substrate 1; and removing the first substrate 1 using a cutting tool 4, the photoelectric conversion element, and the photoelectric conversion element module are provided. <P>COPYRIGHT: (C)2013,JPO&INPIT |
