发明名称 CONTACT RING FOR AN ELECTROCHEMICAL PROCESSOR
摘要 An electro-processing apparatus includes a rotor in a head, and a contact ring assembly on the rotor. The contact ring assembly may have one or more strips of contact fingers on a ring base, with contact fingers clamped into position on the ring base. The strips may have spaced apart projection openings, with the projections on the ring base extending into or through the projection openings. A shield ring may be attached to the ring base, to clamp the contact fingers in place, and/or to provide an electric field shield over at least part of the contact fingers. The contact fingers may be provided as a plurality of adjoining forks, with substantially each fork including at least two contact fingers.
申请公布号 US2013134035(A1) 申请公布日期 2013.05.30
申请号 US201113306666 申请日期 2011.11.29
申请人 HARRIS RANDY A.;MCHUGH PAUL R.;WILSON GREGORY J.;APPLIED MATERIALS, INC. 发明人 HARRIS RANDY A.;MCHUGH PAUL R.;WILSON GREGORY J.
分类号 C25D17/00;C25F7/00 主分类号 C25D17/00
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