| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a foreign substance detection device in which an error in detecting a foreign substance occurs less frequently. <P>SOLUTION: A background data acquisition unit 10 stores, as background data, an image in which a foreign substance is not detected by a threshold determination unit 22 among linear intensity images output by an imaging device 2 by a data amount of a background storage window size 40a, and calculates a threshold 13a from an intensity value for a background window size 40b. A foreign substance detection unit 20 calculates an average intensity value 21a from intensity values for the background window size 40b in a detection target intensity image, compares the average intensity value 21a with the calculated threshold 13a, and detects the presence/absence of a foreign substance. A detection error removal unit 30 determines a foreign substance detection pixel outside a detection error determination window having a size in accordance with detection error determination window upper and lower limits 40c as a detection error, removes the pixel from a detection target, and makes final determination of the presence/absence of a foreign substance. <P>COPYRIGHT: (C)2013,JPO&INPIT |
