发明名称 |
Equipment for Making IC Shielding Coating Layer and Metal Shielding Layer of IC |
摘要 |
Equipment for making IC shielding coating layer and a metal shielding layer of IC. The equipment comprises a base, a work support, a plurality of medium frequency magnetron targets and a plurality of multi-arc ion targets. The base comprises a chamber. The work support is disposed in the chamber and movably connected with a plurality of rotation axes. Each rotation axes comprises at least one fixture. The fixture is used to put at least one IC. Each medium frequency magnetron target and each multi-arc ion target are disposed in the chamber. The medium frequency magnetron targets and the multi-arc ion targets are used to sputter a metal material over the IC to form at least one metal shielding layer on a surface of the IC. |
申请公布号 |
US2013134036(A1) |
申请公布日期 |
2013.05.30 |
申请号 |
US201213450843 |
申请日期 |
2012.04.19 |
申请人 |
LIU CHAO-LUN;CHIOU YAU-HUNG;FAN SHU-HUI;CHENMING MOLD IND. CORP. |
发明人 |
LIU CHAO-LUN;CHIOU YAU-HUNG;FAN SHU-HUI |
分类号 |
C23C14/35;C23C14/58 |
主分类号 |
C23C14/35 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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