| 摘要 |
<P>PROBLEM TO BE SOLVED: To measure both of a surface shape and an internal structure. <P>SOLUTION: According to one embodiment, a measuring device includes electro-magnetic wave irradiating means, detecting means, data processing means, membrane structure converting means and membrane structure measuring means. The electro-magnetic wave irradiating means generates an electro-magnetic wave to irradiate a base substance therewith. The detecting means measures intensity of the electro-magnetic wave scattered or reflected on the base substance. The data processing means processes a signal from the detecting means, forms and analyzes a scattering profile and calculates a surface shape of a periodic structure. The membrane structure converting means calculates a virtual membrane structure related to a surface structure of the periodic structure and calculates a virtual membrane structure related to an internal structure of the periodic structure from reference data. The film structure measuring means sets measuring conditions from the virtual membrane structure, acquires and analyzes a reflectance profile by actual measurement concerning the periodic structure in accordance with the measuring conditions, calculates a membrane thickness of each of layers constituting the periodic structure and restructures the shape of the periodic structure by using the membrane thickness calculated and the virtual membrane structure. <P>COPYRIGHT: (C)2013,JPO&INPIT |
