| 摘要 |
A detection element has first and second fixed portions, first and second vertical beams, a horizontal beam, and four arms. First ends of the first and second vertical beams are connected to the first fixed portion, and second ends of the first and second vertical beams are connected to the second fixed portion. A first end of the horizontal beam is connected to a center portion of the first vertical beam, and a second end of the horizontal beam is connected to the center portion of the second vertical beam. First ends of respective arms are connected to the horizontal beam, and weights are formed at second ends of the respective arms. The first vertical beam has: a first slit formed further toward the first fixed portion than the center portion; a second slit formed further toward the second fixed portion than the center portion; and a connecting portion between the first and the second slits. The second vertical beam has: a third slit formed further toward the first fixed portion than the center portion; a fourth slit formed further toward the second fixed portion than the center portion; and a connecting portion between the third and fourth slits. |
