发明名称 SEMICONDUCTOR DEVICE
摘要 <p>This first semiconductor device is provided with a semiconductor substrate comprising a cell region and a non-cell region provided to the periphery of the cell region. The cell region is provided with: a first semiconductor region of a first electroconductivity type; a second semiconductor region of a second electroconductivity type formed on a surface of the semiconductor substrate on the side of the surface of the first semiconductor region; a trench-type insulated gate that is formed to a depth penetrating through the second semiconductor region from the surface side of the semiconductor substrate and coming into contact with the first semiconductor region, the longitudinal direction stretching in a first direction; and a first trench electroconductor, at least a part of which is formed in the cell region between the insulated gate and the non-cell region, and in which a trench is filled with an electroconductor covered with an insulating film. The first trench electroconductor is provided with a first portion that stretches in the first direction and a second portion that projects out in a second direction orthogonal to the first direction and oriented from the cell region side toward the non-cell region; at least a part of the bottom of the second portion reaches a position deeper than the boundary between the first semiconductor region and the second semiconductor region.</p>
申请公布号 WO2013076820(A1) 申请公布日期 2013.05.30
申请号 WO2011JP76942 申请日期 2011.11.22
申请人 TOYOTA JIDOSHA KABUSHIKI KAISHA;HIRABAYASHI YASUHIRO;SENOO MASARU 发明人 HIRABAYASHI YASUHIRO;SENOO MASARU
分类号 H01L29/78 主分类号 H01L29/78
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