发明名称 Solid-state imaging device, production method thereof, and electronic device
摘要 Disclosed is a solid-state imaging device which includes a pixel section, a peripheral circuit section, a first isolation region formed with a STI structure on a semiconductor substrate in the peripheral circuit section, and a second isolation region formed with the STI structure on the semiconductor substrate in the pixel section. The portion of the second isolation region buried into the semiconductor substrate is shallower than the portion buried into the semiconductor substrate of the first isolation region, and the height of the upper face of the second isolation region is equal to that of the first isolation region. A method of producing the solid-state imaging device and an electronic device provided with the solid-state imaging devices are also disclosed.
申请公布号 EP2109143(B1) 申请公布日期 2013.05.29
申请号 EP20090004724 申请日期 2009.03.31
申请人 SONY CORPORATION 发明人 TATANI, KEIJI;MATSUMOTO, TAKUJI;TATESHITA, YASUSHI;KOGA, FUMIHIKO;NAGANO, TAKASHI;TOYOSHIMA, TAKAHIRO;YAMAGUCHI, TETSUJI;NAKAZAWA, KEIICHI;MIYASHITA, NAOYUKI;NAGAHAMA, YOSHIHIKO
分类号 H01L27/146 主分类号 H01L27/146
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