发明名称 |
In-situ deposition of battery active lithium materials by plasma spraying |
摘要 |
A method and apparatus for forming an electrochemical layer of a thin film battery is provided. A precursor mixture comprising precursor particles dispersed in a carrying medium is activated in an activation chamber by application of an electric field to ionize at least a portion of the precursor mixture. The activated precursor mixture is then mixed with a combustible gas mixture to add thermal energy to the precursor particles, converting them to nanocrystals, which deposit on a substrate. A second precursor may be blended with the nanocrystals as they deposit on the surface to enhance adhesion and conductivity.
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申请公布号 |
US8449950(B2) |
申请公布日期 |
2013.05.28 |
申请号 |
US20100862244 |
申请日期 |
2010.08.24 |
申请人 |
SHANG QUANYUAN;YANG LU;BROWN KARL M.;OLGADO DONALD J. K.;PEBENITO VICTOR;BOLANDI HOOMAN;ISHIKAWA TETSUYA;BACHRACH ROBERT Z.;CHEN LIANG-YUH;APPLIED MATERIALS, INC. |
发明人 |
SHANG QUANYUAN;YANG LU;BROWN KARL M.;OLGADO DONALD J. K.;PEBENITO VICTOR;BOLANDI HOOMAN;ISHIKAWA TETSUYA;BACHRACH ROBERT Z.;CHEN LIANG-YUH |
分类号 |
C23C4/06;B05D3/00;B05D3/14;C23C4/08;H05H1/24 |
主分类号 |
C23C4/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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