METHOD AND APPARATUS FOR DETECTING POOR CHIP IN SEMICONDUCTOR CHIP FOUNDRY PROCESS

摘要

PURPOSE: A method and an apparatus for detecting a poor chip in a semiconductor chip manufacturing process are provided to reduce costs by recognizing a normal chip as a chip which has a normal function although there is a defect in a nonessential element. CONSTITUTION: A control unit(910) determines whether there are defects in elements consisting of a semiconductor chip. The control unit determines whether a defect element is an essential element or not. The control unit determines the defect element as a normal element if the defect element is a nonessential element. The control unit includes a connection information acquisition part(920) and a nonessential element determination part(930). The connection information acquisition part inputs connection information to a table model. [Reference numerals] (910) Control unit; (920) Component connection information acquisition part; (930) Nonessential element determination part