| 摘要 |
A rotary disk gyroscope (20) includes a drive mass (28) and a sense mass (32). The sense mass (32) includes a cutout region (46, 48) located proximate an axis of rotation (40). Torsion springs (38), located in the cutout region (46, 48), connect the sense mass (32) to the drive mass (28). The torsion springs (38) enable the sense mass (32) to rotate about the axis of rotation (40) in response to an angular velocity of the gyroscope (20). Spring anchorage structures (30) are also positioned in the cutout region (46, 48), and flexibly couple the drive mass (28) to the substrate (22). In addition, a drive system (68) resides in the cutout region (46, 48) and actuates the drive mass (28) to move with an oscillatory motion. In a dual axis configuration, the gyroscope (20) further includes a rectangular-shaped second sense mass (36) surrounding the disk-shaped drive mass (28).
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