| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a novel and improved manufacturing method for an organic light-emitting device, and an organic light-emitting device, in which the characteristics of a barrier layer do not change even at high temperature of a TFT process, the process stability is increased by reducing stress on a substrate, and mass production of the substrates is possible. <P>SOLUTION: A manufacturing method for an organic light-emitting device includes the steps of: preparing a substrate 10; and forming a barrier layer 20 on the substrate 10. The step of forming the barrier layer 20 includes the steps of: forming a barrier layer side first inorganic film 21 on the substrate 10; forming a barrier layer side first organic film 22 including polyimide by depositing monomer for forming polyimide on the barrier layer side first inorganic film 21 by a thermal deposition method, a plasma chemical vapor deposition method, or an atomic layer deposition method and then thermally processing the monomer; and forming a barrier layer side second inorganic film 23 on the barrier layer side first organic film 22. <P>COPYRIGHT: (C)2013,JPO&INPIT |
