摘要 |
<P>PROBLEM TO BE SOLVED: To provide a solid-liquid separation method for silicon slurry which is capable of recycling silicon slurry with a simple structure and to provide an apparatus therefor. <P>SOLUTION: The solid-liquid separation apparatus 10 includes a silicon slurry stock solution tank 12, a reaction tank 20, an acidic solution tank 22, a neutralization tank 30, a neutralizing agent solution tank 32, a thermal decomposition machine 40, and a hot blast generating furnace 50. The silicon slurry containing a solid component and a liquid component is sufficiently reacted with the acidic solution in the reaction tank 20, then neutralized in the neutralization tank 30 by the neutralizing agent and subsequently the liquid component is vaporized by the thermal decomposition machine 40. Thus the silicon slurry is separated into solid and liquid. The solid component that is obtained by the solid-liquid separation is a powder material and includes silicon powder as a main ingredient. Therefore, the silicon powder can be recycled from the silicon slurry. Also when the vaporized liquid component is distilled, oil can be recovered and recycled as a resource. <P>COPYRIGHT: (C)2013,JPO&INPIT |