摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramic substrate with little displacement between conductor layers individually formed on a top surface and a rear surface of a substrate body made of ceramic, and a method for reliably manufacturing the substrate. <P>SOLUTION: A ceramic substrate comprises: a first conductor layer 5 on which plural ceramic layers are laminated and which are formed on a principal surface 3; a second conductor layer 6 formed on a principal surface 4 and having a diameter d2 in a plane view smaller than a diameter of the first conductor layer 5; conductor columns 7, 8 connected to the first and second conductor layers 5, 6; and plural positioning parts 10a formed on an ear part (peripheral part) 9. The positioning part 10a is a communication hole individually penetrating through ceramic layers s1a-s2, and formed so that a first through hole h1a and a second through hole h2a with different sectional areas are communicated in an axial direction. The sectional area of the second through hole h2a penetrating through the ceramic layer s2 is smaller than the sectional area of the first through hole h1a, and at least one part of a peripheral edge 11a of an inner periphery 11 of the second through hole h2a can be visualized from the principal plane 3 in plane view. <P>COPYRIGHT: (C)2013,JPO&INPIT |