摘要 |
<P>PROBLEM TO BE SOLVED: To provide a capacitor and a method of manufacturing the same, in which connection reliability to a substrate is improved. <P>SOLUTION: The capacitor includes a pair of conductor layers (21 and 22) which face each other across a predetermined distance, a dielectric layer (23) made of oxide of valve metal which is interposed between the pair of conductor layers, many holes (24) formed to penetrate the dielectric layer so as to reach the pair of conductor layers respectively, in the direction orthogonal to the pair of conductor layers, a first electrode (25) formed by filling the hole with electrode material and connected to one of the conductor layers and a second electrode (26) connected to the other of the conductor layers, and insulating parts (21a and 24b) which electrically insulate between the first electrode and the other of the pair of conductor layers while electrically insulate between the second electrode and one of the pair of conductor layers. A diameter of the hole which is observed in a cross section parallel to the pair of conductor layers of the dielectric layer is formed so that it gradually increases as advances from a cross section position on one end side of the dielectric layer to a cross section position on the other end side of the dielectric layer. <P>COPYRIGHT: (C)2013,JPO&INPIT |