发明名称 |
METHOD OF FABRICATING A MICRO DEVICE TRANSFER HEAD |
摘要 |
A micro device transfer head and head array are disclosed. In an embodiment, the micro device transfer head includes a base substrate, a mesa structure with sidewalls, an electrode formed over the mesa structure, and a dielectric layer covering the electrode. A voltage can be applied to the micro device transfer head and head array to pick up a micro device from a carrier substrate and release the micro device onto a receiving substrate. |
申请公布号 |
WO2013074356(A1) |
申请公布日期 |
2013.05.23 |
申请号 |
WO2012US63992 |
申请日期 |
2012.11.07 |
申请人 |
LUXVUE TECHNOLOGY CORPORATION |
发明人 |
BIBL, ANDREAS;HIGGINSON, JOHN A.;LAW, HUNG-FAI STEPHEN;HU, HSIN-HUA |
分类号 |
H01L21/58;H01L21/677;H05K13/04 |
主分类号 |
H01L21/58 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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