发明名称 SYSTEM AND METHOD FOR MONITORING OPERATION OF PUMP
摘要 <P>PROBLEM TO BE SOLVED: To provide a method and a system that confirms operations and actions of a pump, and can quickly and accurately detect the proper completion of these operations and actions. <P>SOLUTION: The system for monitoring a pump includes: a first stage pump; a second stage pump in fluid communication with and downstream of the first stage pump; a pressure sensor to measure the pressure of a fluid; and a pump controller to control fluid pressure at the second stage pump by adjusting the operation of the first pump. The pump controller is operable to receive pressure measurements from the pressure sensor, to cause the first stage pump to assert lower pressure on the fluid if the fluid pressure at a dispense chamber in the second stage pump has reached a first predefined threshold, and to cause the first stage pump to assert more pressure on the fluid if the fluid pressure at a dispense chamber in the second stage pump has fallen below a second predefined threshold. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013100825(A) 申请公布日期 2013.05.23
申请号 JP20130018339 申请日期 2013.02.01
申请人 ENTEGRIS INC 发明人 GONNELLA GEORGE;CEDRONE JAMES
分类号 F04B49/08 主分类号 F04B49/08
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