发明名称 ARC DEPOSITION SOURCE HAVING A DEFINED ELECTRIC FIELD
摘要 The invention relates to an arc deposition device, comprising a cathode, an anode, as well as a voltage source for putting the anode at positive potential relative to the cathode. The device also comprises magnetic elements, which cause a magnetic field over the cathode surface, wherein the anode is arranged in the vicinity of the cathode in such a way that the magnetic field lines exiting from the cathode surface hit the anode.
申请公布号 US2013126347(A1) 申请公布日期 2013.05.23
申请号 US201113805730 申请日期 2011.06.03
申请人 KRASSNITZER SIEGFRIED;HAGMANN JUERG;OERLIKON TRADING AG, TRUBBACH 发明人 KRASSNITZER SIEGFRIED;HAGMANN JUERG
分类号 C23C14/35 主分类号 C23C14/35
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