| 摘要 |
PURPOSE: An inside purge jig is provided to have a gas inlet and a gas outlet, thereby performing safe purge work. CONSTITUTION: An inside purge jig includes a first main body(10) and a second main body(20). The first main body comprises a gas inlet and a gas outlet. A bolt(18) which penetrates the first main body passes through each screw hole of a silicon packing(13') and a connection member, and is fixed by a nut(19). A bolt(25) which penetrates the second main body passes through each screw hole of a silicon packing(21') and a connection member(23'), and is fixed by a nut. The first main body and the second main body are connected by a connection member.
|
