发明名称 |
Method for manufacturing 3-dimensional structures using thin film with columnar nano pores and manufacture thereof |
摘要 |
Disclosed is a method for manufacturing 3-dimensional structure using a thin film with a columnar nano pores and a manufacture thereof. A method for packaging an MEMS device or an NEMS device in accordance with an embodiment of the present invention includes: forming a sacrificial layer; forming a thin film having columnar nano pores formed therein by depositing one of a metallic material, an oxide, a nitride and a fluoride on the sacrificial layer; forming a support layer on the thin film and patterning the support layer; removing the sacrificial layer through use of the nano pores of the thin film parts of which are exposed by patterning the support layer; and forming a shielding layer on the thin film and the support layer.
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申请公布号 |
US8445305(B2) |
申请公布日期 |
2013.05.21 |
申请号 |
US20100992555 |
申请日期 |
2010.05.28 |
申请人 |
YOON JUN-BO;LEE BYUNG-KEE;CHOI DONG-HOON;YANG HYUN-HO;KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
YOON JUN-BO;LEE BYUNG-KEE;CHOI DONG-HOON;YANG HYUN-HO |
分类号 |
H01L23/053;H01L21/311 |
主分类号 |
H01L23/053 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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