发明名称 |
Method of manufacturing crystalline silicon solar cells using co diffusion of Boron and Phosphorus |
摘要 |
A method of manufacturing a crystalline silicon solar cell, subsequently including: providing a crystalline silicon substrate having a first side and a second side opposite the first side; pre-diffusing Phosphorus into a first side of the substrate to render a Phosphorus diffused layer having an initial depth; blocking the first side of the substrate; exposing a second side of the substrate to a Boron diffusion source; heating the substrate for a certain period of time and to a certain temperature so as to diffuse Boron into the second side of the substrate and to simultaneously diffuse the Phosphorus further into the substrate.
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申请公布号 |
US8445312(B2) |
申请公布日期 |
2013.05.21 |
申请号 |
US20080742682 |
申请日期 |
2008.11.13 |
申请人 |
MIHAILETCHI VALENTIN DAN;KOMATSU YUJI;STICHTING ENERGIEONDERZOEK CENTRUM NEDERLAND |
发明人 |
MIHAILETCHI VALENTIN DAN;KOMATSU YUJI |
分类号 |
H01L21/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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