| 摘要 |
FIELD: electrical engineering.SUBSTANCE: chamber (15) is capable to maintain a vacuum state. The first electrode (18), roller-shaped, is installed inside the chamber (15) so that to enable rotation. The electrode (18) has the part the target product being treated (5) contacts and the part the target product being treated (5) fails to contact. The gas supply unit (20) includes the second electrode (23) mounted opposite the first electrode (18) inside the chamber and capable to supply process gas into the area between the product (5) and the second electrode (23). The third electrode (6) has a surface positioned opposite the first electrode (18) part the target product being treated (5) fails to contact. AC source (3) for supply of AC voltage into the area between the third electrode (6) and the first electrode (18).EFFECT: AC voltage is supplied to the roller electrode (18) in a contactless way so that no contact-induced wear occurs with electrodes service life extended.8 cl, 3 dwg |
