METHOD AND APPARATUS FOR STABLY DETECTING GASEOUS FLUORIDE

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for stably performing a detection and quickly, highly sensitively and accurately detecting gaseous fluoride without being affected by humidity and interference of interfering gas in the method and apparatus that cause the gaseous fluoride in a sampling gas to react with a detecting agent for detecting thereof on a substrate surface and detects the gaseous fluoride by a change in an optical reflectance of the detecting agent.

SOLUTION: The humidity of the sampling gas to be introduced in a rection filed where the gaseous fluoride reacts with the detecting agent, or the humidity of the sampling gas is adjusted according to the water content of the substrate and/or the detecting agent so as to simply, quickly and highly sensitively perform the detection without variation.

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