| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultraviolet irradiation device capable of reliably detecting an intensity reduction of excimer light caused by disappearance of discharge even if discharge of an excimer lamp locally disappears, and capable of radiating excimer light from the excimer lamp with high efficiency. <P>SOLUTION: The ultraviolet irradiation device comprises: an excimer lamp having an ultraviolet reflection film containing alumina formed on an inner surface of a discharge vessel and the discharge vessel; and a photosensor which detects fluorescent light from the alumina in the ultraviolet reflection film. <P>COPYRIGHT: (C)2013,JPO&INPIT |
