| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress cost for a mask used for exposure without necessitating a complicated and expensive exposure mechanism for exposing a large sized material to be exposed. <P>SOLUTION: The exposure equipment includes a plurality of photo masks formed with a light blocking region for blocking irradiation light from a light source and a light transmission region for transmitting the irradiation light on a glass substrate and a mask retaining section for retaining the plurality of photo masks in between the light source and the transported material to be exposed. The mask retaining section retains by connecting the plurality of photo masks which are juxtaposed on a same plane so that respective end sections of adjacent photo masks are in contact with each other. In this case, the plurality of photo masks compose one piece of photo mask as a whole by being juxtaposed and connected, and are individually attachable to/detachable from the mask retaining section. <P>COPYRIGHT: (C)2013,JPO&INPIT |
